EUV source CO2 laser metrology and control

  • Graduation Project
  • Anywhere

Website ASML


The development & engineering (D&E) laser source
department is responsible for the CO2 seed laser,
amplifiers, beam transport system, optical platform, final
focus metrology & focus unit. These modules of the EUV
source contains sensors to measure fluence, power,
intensity & phase of the CO2 laser beams. And actuators for
correction: Electro-Optical Modulators (EOM) for pulse
slicing, Acoustic-optical Modulators (AOM) for amplitude,
radio frequency for power, Mirror position & shaping (by
pressure and heating) for optical correction.

Your assignment
Use system identification methods to calibrate first principle
physics models. Use calibrated models to improve CO2
laser source control and diagnostics. 3 months for literature
study and definition of thesis goal. 6 months for thesis.
Resulting in actuation and measurement sequence test
proposal. MATLAB or Python code for system identification
base on experimental results. MATLAB or Python for
simulation, model calibration and qualification.
Recommendations for further development. Literature study
& thesis report.

Your profile
education: Master student. Background: Systems &
Controls, personal characteristics: drive to gain
understanding by experiment and modeling, skills: familiar
with first principle optics, thermal & mechanical modeling,
expertise: MATLAB and Python coding.

This is an graduation internship for 4 days a week with
duration of a minimum 9 months.

Please keep in mind that we can only consider students
(who are enrolled at a school during the whole internship
period) for our internships and graduation assignments.

What ASML offers
Your internship will be in one of the leading Dutch
corporations, gaining valuable experience in a highly dynamic
environment. You will receive a monthly internship allowance
of 500 euro (maximum), plus a possible housing or travel
allowance. In addition, you’ll get expert, practical guidance
and the chance to work in and experience a dynamic,
innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the
devices that keep us informed, entertained and safe; that
improve our quality of life and help to tackle the world’s
toughest problems.

We build some of the most amazing machines that you will
ever see, and the software to run them. Never satisfied, we
measure our performance in units that begin with pico or

We believe we can always do better. We believe the winning
idea can come from anyone. We love what we do – not
because it’s easy, but because it’s hard.

Students: Getting ready for real-world R&D
Pushing technology further is teamwork, and our R&D team is
more than 5,500 people strong, with major sites on three
continents. Dozens of diverse, interdisciplinary teams work in
parallel to meet a challenging development schedule.

In such an environment, your colleagues may be sitting next
door, or they could be thousands of kilometers away in a
different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this
world of industrial-strength R&D and get a feel for that excites
you most. Will you design a part of the machine, or make sure
it gets built to the tightest possible specifications? Will you
write software that drives the system to its best performance,
or work side-by-side with the engineers of our customers in a
fab, optimizing a system to the requirements of the customer?
How will you be part of progress?

Field: Systems & Controls
Telephone: +31 (0)40 268 6773

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